| Specifications | ||||||
| Wafer Size | 12 inch | |||||
| Chip Size | 20mm×25mm | |||||
| Chip Name | Chip_10_15 | Chip_20_25 | Chip_30_35 | |||
| Metal Height | 5.5μm | |||||
| Facing Length | 3mm | |||||
| Line/Space | 15μm/10μm | 15μm/15μm | 15μm/20μm | 15μm/25μm | 15μm/30μm | 15μm/35μm |
| Pitch | 25μm | 30μm | 35μm | 40μm | 45μm | 50μm |
| Number of Chip | 34 chips/wafer | 40 chips/wafer | 34 chips/wafer | |||
