Practical Components IP80 MarkIV-0101JY advanced test wafer
Silicon Interposer [for CC80MarkIV-0101JY (A/B)]
Chip Structure
- Base Layer : P-TEOS
- Metal Layer : TiN / AI-0.5%Cu
- Passivation Layer : HDP / P-SiN
*TEOS : Tetraethoxysilane
*HDP : High Density Plasma
| Specifications | |
| Wafer Size | 8 inch |
| Wafer Thickness | 725±25μm |
| Chip Size | 15.0mm x 15.0mm |
| Pad Pitch |
1. 40μm [10Row] x 50μm[192Row] x 2(Peripheral) |
| Function | Daisy Chian |
| Electrode | Electroless Ni/Au plating |
| Pad Size | 1. 32μm 2. 32μm 3. 32μm 4. 150μm |
| Passivation Opening |
1. 26μm |
| Bump Size | 1. 27μm 2. 27μm 3. 27μm 4. 141μm |
| Number of Bump/Pad | 1. 3840 bumps / 3840 pads 2. 1172 bumps / 1172 pads 3. 2721 bumps / 2721 pads 4. 328 bumps / 328 pads |
| Scribe Width | 120μm |
| Number of Chip | 97 chips/wafer |